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High NA diffraction-limited objective |
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Through focus spot diagrams, step size 0.5um |

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Close up view of coverslip. |


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A 0.8NA microscope objective with diffraction-limited performance at 633nm was required for focussing a laser beam to a tiny spot for an optical profiling application. The image plane was to be formed through a 170um coverslip glass. Using ZEMAX ray trace software the through-focus spot diagrams, below, show the excellent on-axis performance of the design. |
